JPH0346455Y2 - - Google Patents

Info

Publication number
JPH0346455Y2
JPH0346455Y2 JP14820884U JP14820884U JPH0346455Y2 JP H0346455 Y2 JPH0346455 Y2 JP H0346455Y2 JP 14820884 U JP14820884 U JP 14820884U JP 14820884 U JP14820884 U JP 14820884U JP H0346455 Y2 JPH0346455 Y2 JP H0346455Y2
Authority
JP
Japan
Prior art keywords
aperture
base body
center
electron
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14820884U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6162349U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14820884U priority Critical patent/JPH0346455Y2/ja
Publication of JPS6162349U publication Critical patent/JPS6162349U/ja
Application granted granted Critical
Publication of JPH0346455Y2 publication Critical patent/JPH0346455Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP14820884U 1984-09-28 1984-09-28 Expired JPH0346455Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14820884U JPH0346455Y2 (en]) 1984-09-28 1984-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14820884U JPH0346455Y2 (en]) 1984-09-28 1984-09-28

Publications (2)

Publication Number Publication Date
JPS6162349U JPS6162349U (en]) 1986-04-26
JPH0346455Y2 true JPH0346455Y2 (en]) 1991-10-01

Family

ID=30706430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14820884U Expired JPH0346455Y2 (en]) 1984-09-28 1984-09-28

Country Status (1)

Country Link
JP (1) JPH0346455Y2 (en])

Also Published As

Publication number Publication date
JPS6162349U (en]) 1986-04-26

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